Sputtering system

Aurion B-VPA-28

Sputtering System – Aurion Plant Technology

Manufacturer: Aurion Plant Technology
System Type: B-VPA-28
Serial Number: 302343

Technical Data and Equipment

The sputtering system has a total weight of approximately 7,000 kg and dimensions of 6,217 × 3,500 × 2,100 mm (W × D × H), each without vacuum pumps. The chamber volume is approximately 670 liters. The maximum ambient temperature is 25 °C.

The electrical mains connection is with 400/230 V at 50 Hz. The connection power is approximately 100 kVA with a current draw of approximately 125 A.

Substrate and Heating System

Substrate dimensions: 38 × 31 × 1.08 mm

Transport pallets: 416.9 × 504.5 mm

Capacity: 144 substrates per transport pallet

Substrate heating up to a maximum of 250 °C

Vacuum and Process Gas System

Achievable final pressure: < 1 × 10⁻⁷ hPa

Process gas: Argon

2 Bronkhorst F-201CS flow controllers, each with 500 mln/min

Coating System

2 DC generators ADL GX 150/800, each with 15 kW

Vacuum components (Pfeiffer Vacuum)

Cjdpfe Ah Tlgox Ah Rshd
4 × Roughing pump DUO 35

2 × Roughing pump DUO 65

2 × Rotary vane pump Okta 500

3 × Turbo pump HiPace 1200 U

1 × Turbo pump HiPace 2300 U

Valve technology from VAT

Control and Automation Technology

The system control is based on a Siemens SIMATIC S7 controller and includes a panel PC with WinCC for operation and process visualization.

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